Nanopatterned sapphire substrates in deep-UV LEDs: is there an optical benefit?
نویسندگان
چکیده
منابع مشابه
High-efficiency InGaN-based LEDs grown on patterned sapphire substrates.
GaN films grown on PSS are investigated by XRD, CL, SEM and TEM. There are low threading dislocations (TDs) with larger fill factor, which results in better electrostatic discharge (ESD) yield of LEDs. The effect of growth rate on dislocations in GaN films grown on PSS is investigated by TEM. It is found that dislocations density decreases as the growth rates decrease. And the performance of In...
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Large-scale nanopatterned sapphire substrates were fabricated by annealing of patterned Al thin films. Patterned Al thin films were obtained by soft UV-nanoimprint lithography and reactive ion etching. The soft mold with 550-nm-wide lines separated by 250-nm space was composed of the toluene-diluted polydimethylsiloxane (PDMS) layer supported by the soft PDMS. Patterned Al thin films were subse...
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Optically-based chemical and biological sensors require optoelectronic devices with specific emission and detection wavelength ranges. Semiconductor optoelectronic devices applicable to this sensing are of particular interest due to their low power consumption, compact size, long lifetime, and low cost. We report the electrical and optical properties of deep UV p-i-n photodiodes (PDs) based on ...
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A UV light emitting diode (LED) with a maximum output of 372 nm was collimated using a pinhole and a small plastic tube and focused using a microscope objective onto a substrate for direct lithographic patterning of the photoresist. Movement of the substrate with a motorised linear stage (syringe pump) allowed lines in SU-8 to be pattered with a width down to 35 microm at a linear velocity of 8...
متن کاملDeep-uv Transparent Bulk Single-crystalline Aln Substrates
Bulk aluminium nitride (AlN) is a very promising substrate material for UV optoelectronics based on AlGaN ternary compounds. AlN single crystals exceeding 1'' in diameter can now be grown by physical vapour transport (PVT). UV transparency is of high interest for UV devices designed to emit through the substrate. We report on 500 μm thick bulk AlN substrates with plain UV transmittance of 50% (...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2020
ISSN: 1094-4087
DOI: 10.1364/oe.379438